منابع مشابه
The New, New Limits of Optical Lithography
The end of optical lithography has been so often predicted (incorrectly) that such predictions are now a running joke among lithographers. Yet optical lithography does have real, physical limitations and even more real economic limits, and an accurate estimation of these limits is essential for planning potential next generation lithography (NGL) efforts. This paper will review the two types of...
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ژورنال
عنوان ژورنال: Nature Nanotechnology
سال: 2009
ISSN: 1748-3387,1748-3395
DOI: 10.1038/nnano.2009.180